>> P.349
ApplicationsLinearScalesSemiconductorfabricationequipmentDicingsawpositioningVariousNCmachinetoolsHigh-precisionfullyclosedloopcontrolATSeries-ReferenceATSeries-ReferenceSlidingtableWorkpieceCuttingbladeLinearscalesLinearscaleBaseLithographyequipmentScanningstagepositioningSTSeries-ReferenceSTSeries-ReferenceElectroniccomponentmountingequipmentHigh-speed,high-precisionmountingofelectroniccomponentsLinearscalesLinearscaleElectronmicroscopeFPDinspectionequipmentMaskobservation,circuitpatternmeasurement,defectinspection,etc.DefectinspectionandrepairpositiondeterminationSTSeries-ReferenceSTSeries-ReferenceElectronbeamCCDcameraWorkchamberMonitorSiliconwaferXYtable(withintegratedlnearscales)VacuumpumpLinearscalesXYテーブル駆動方式8-62
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